Terms Glossary M Micro-Electro-Mechanical Systems
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Micro-Electro-Mechanical Systems (MEMS)

Micro-Electro-Mechanical Systems (MEMS) is a miniaturized mechanical and electro-mechanical element typically used for measurements. They usually consist of a central unit that processes data and several components that interact with the surroundings, such as microsensors.
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MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometers in size (i.e. 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometers to a millimetre (i.e. 0.02 to 1.0 mm). They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the surroundings such as microsensors.
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